A novel low noise hydrogenated amorphous silicon pixel detector
نویسندگان
چکیده
Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 squar pixels with 380 lm pitch based on a n–i–p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. Th deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using bet particles from Ni and Sr sources was performed.
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